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蓝宝石单晶精密磨削表面形貌的分形行为研究

蓝宝石单晶精密磨削表面形貌的分形行为研究

Research on Fractal Behavior of Surface Topography in Precision Grinding of Monocrystal Sapphire

Research on Fractal Behavior of Surface Topography in Precision Grinding of Monocrystal Sapphire

doi:
10.3901/JME.2015.19.174
摘要:
如何合理有效地评价光学晶体微结构表面质量,是目前光学元件精密制造与应用领域面临的重要问题。基于分形理论,采用三维和二维盒计数方法对蓝宝石单晶磨削表面形貌进行了分析,结果表明磨削表面的三维分形维数 Ds与表面粗糙度呈反比关系,而且三维分形维数越高表面纹理越精细,三维分形维数越低表面缺陷越多。磨削表面截面轮廓的二维分形维数DL分布规律可以反映材料去除方式的变化。当二维分形维数DL沿磨削方向呈强对称分布时,该磨削表面为延性域去除;若呈弱对称性或不规则分布,则该磨削表面为脆性域去除。研究证实了分形方法不仅可用于综合表征蓝宝石磨削表面形貌,还可用于揭示蓝宝石磨削表面的材料去除机理。
Abstract:
At present, how to evaluate the quality of precision ground surface of optical crystals reasonably and effectively is an important problem for the field of optical element processing and its application. A three dimension (3D) and two dimension (2D) box-counting fractal analysis methods are used to analyze ground monocrystal sapphire surface topography. The results obtained show that the 3D fractal dimensionDsshows a negative correlation with the surface roughness parameterRa. As theDsare higher, its topography is more exquisite. For the ground surface with smallerDs, the pronounced surface defects are exhibited in ground surface. The change of material removal mode can be implied from the distribution of 2D cross-sectional profile fractal dimensionDL..When the 2D fractal dimension is highly symmetry along the grinding direction, the material removal mode is ductile. When the 2D fractal dimension is weakly asymmetry or irregular distribution, the material removal mode is brittle. This study indicates that the fractal method can not only be used for comprehensive characterization of ground monocrystal sapphire, but also be used to reveal the material removal mechanism of ground monocrystal sapphire.
作者 王秋燕 [1] 梁志强 [1] 王西彬 [1] 赵文祥 [1] 焦黎 [1] 吴勇波 [2] 周天丰 [1]
Author: WANG Qiuyan[1] LIANG Zhiqiang[1] WANG Xibin[1] ZHAO Wenxiang[1] JIAO Li[1] WU Yongbo[2] ZHOU Tianfeng[1]
作者单位
  1. 北京理工大学先进加工技术国防重点学科实验室北京 100081
  2. 秋田县立大学系统科学技术学部秋田 0150055日本
期 刊: 机械工程学报 ISTIC EI SCI PKU CSSCI
Journal: Journal of Mechanical Engineering
年,卷(期) 2015, (19)
分类号 TH161
关键词: 分形 知识脉络 蓝宝石单晶 知识脉络 磨削表面 知识脉络 材料去除方式 知识脉络
Keywords: fractal monocrystal sapphire ground surface material removal mode
机标分类号 TQ1 TG5
基金项目 国家自然科学基金,国家重点基础研究发展计划(973计划,2015CB05990)资助项目。
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