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冶金法制备太阳能级多晶硅的耦合除杂研究

冶金法制备太阳能级多晶硅的耦合除杂研究

Coupling of Metallurgical Method to Remove Impurities in Solar Grade Polycrystalline Silicon

Coupling of Metallurgical Method to Remove Impurities in Solar Grade Polycrystalline Silicon

doi:
10.15541/jim20160324
摘要:
以工业硅为原料,利用介质熔炼、定向凝固和电子束熔炼三种熔体处理技术对工业硅中的B、P和金属杂质进行了去除,制备出了99.9999%级多晶硅材料,其中,杂质B和P的含量分别低于0.20 ppmw(parts per million(weight),百万分之一质量),金属杂质总含量(TM)低于0.23 ppmw.研究发现,介质熔炼去除杂质B的过程中,熔体中发生氧化还原反应可以有效去除大部分的杂质Al和Ca;电子束熔炼过程中,利用饱和蒸气压原理可以有效去除挥发性杂质P、Al、Ca,同时降束诱导多晶硅定向凝固,可将其他金属杂质进一步去除.本研究通过各技术间的耦合除杂,减少了冶金法提纯多晶硅的工序,为连续化、规模化生产提供了技术支撑.
Abstract:
Preparation of 6N grade polycrystalline silicon materials using raw materials of industrial silicon was explored by medium melting, directional solidification and electron beam melting. The contents of impurities B and P in the samples are both lower than 0.20 ppmw, while the total content of metal impurity (TM) is less than 0.23 ppmw. Dur-ing the process of removing B by medium melting, a large proportion of Al and Ca is simultaneously removed through the redox reaction. During the process of electron beam melting, volatile impurities including P, Al and Ca are fur-ther effectively removed by using saturated vapor pressure. Meanwhile, other metal impurities are removed by de-creasing beam power, which induces the occurrence of directional solidification. Coupling of metallurgical methods reduces the purification process of polycrystalline silicon, and provides the technical support for continuous and large-scale production.
作者 李鹏廷 [1] 王凯 [1] 姜大川 [1] 任世强 [1] 谭毅 [1] 安广野 [2] 张磊 [2] 郭校亮 [2] 王峰 [2]
Author: LI Peng-Ting[1] WANG Kai[1] JIANG Da-Chuan[1] REN Shi-Qiang[1] TAN-Yi[1] AN Guang-Ye[2] ZHANG Lei[2] GUO Xiao-Liang[2] WANG Feng[2]
作者单位
  1. 大连理工大学材料科学与工程学院,大连116024;大连理工大学辽宁省太阳能光伏系统重点实验室,大连116024
  2. 大工(青岛)新能源材料技术研究院有限公司,青岛,266200
期 刊: 无机材料学报 ISTIC EI SCI PKU CSSCI
Journal: Journal of Inorganic Materials
年,卷(期) 2017, 32(3)
分类号 TF89
关键词: 工业硅 知识脉络 介质熔炼 知识脉络 定向凝固 知识脉络 电子束熔炼 知识脉络
Keywords: industrial silicon medium melting directional solidification electron beam melting
机标分类号
基金项目 国家自然科学基金,中国博士后科学基金(2014M551076) National Natural Science Foundation of China,China Postdoctoral Science Foundation
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